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Prior to 1985, a group existed that worked actively as the industrial division of the Vacuum Society of Japan. In 1985, the group became independent of the Vacuum Society of Japan, and is the current Japan Vacuum Industry Association.
The Vacuum Society of Japan was established in July 1958 and performed two kinds of activities - academic and industrial. Since around 1981, vacuum technology has been considered as a key, leading-edge technology, supporting the development of main industries including the semiconductor and electronics industries. As a result, the vacuum industry began to hold the position as one of the most important industries. In the vision for the industrial equipment industry summarized by the MITI policy conference held in August 1984, the vacuum industry was given the position as "a backbone industry supporting the development of leading-edge technologies," and the vacuum industry itself found it necessary to introduce organizational activities for the advancement of the industry.
With such changes in the environment that surrounded the vacuum industry, it was important to promote both academic research and industrial development. In order to provide agility and flexibility to the development of the vacuum industry, it became paramount to separate the industrial division from the Vacuum Society of Japan and to reorganize it as an independent industrial organization.
In such circumstances, the industrial division at the time decided to become independent, and JVIA was established in July 1985.

Since	Year	Chair Person		Main Achievements and Events
		Order	Name (Company)
0	1985	1	Taizo Saito (Tokuda)	Japan Vacuum Industry Association formed after being independent of Vacuum Society of Japan. The Kansai Branch, Planning, Technology, Investigation and PR committees formed. The 7th International Vacuum Exhibition convened.
1	1986	2	Zenjiro Oda (Anelva)	The "JVIA Journal" launched. Member's register published. The first AEJ Forum convened.
2	1987		Zenjiro Oda (Anelva)	The 2nd AEJ Forum convened. Various regulations established.
3	1988	3	I-ichiroh Kasaoka (Osaka Vacuum)	The "JVIA Journal" published as a seasonal publication four times a year. Investigation of statistics on "orders received and sales turnover" of all members begins. The Planning Committee abolished. The Planning and Control Committee and Planning Section established.
4	1989		Iitiro Kasaoka (Osaka Vacuum)	The report on commissioned investigation project "Investigation and Research of Cutting-edge-technology Taking Advantage of Vacuum" published. The total sales of member companies exceeds 200 billion yen reaching to 237.7 billion yen.
5	1990	4	Shigekazu Kondo (Ulvac)	At the 12th International Vacuum Exhibition, the Chairmen of AVEM U.S.A and of the Vacuum Association of the Republic of China are invited for the initial interaction. The first New Year's Gathering convened.
6	1991		Shigekazu Kondo (Ulvac)	The report on commissioned investigation project "Technology Trend of Ion Applied Vacuum Equipment" published. The "Vacuum Equipment Categorization Table" produced. The 6th (the final) AEJ Forum convened.
7	1992	5	Iwao Izumi (Anelva)	The "JVIA Journal" published as a bimonthly publication. The report on commissioned investigation project "Basic Technology Trend Investigation of Advanced Basic Industry in the 21st Century" published.
8	1993		Iwao Izumi (Anelva)	The "JVIA Journal" changes its name to "Vacuum Journal" "Guideline of SI Unit System" published.
9	1994	6	Saburo Suzuki (Shibaura)	The report on commissioned investigation project "Application of the 21st Centurys Advanced Technology and Result Forecast Investigation" published. The "Vacuum Equipment Categorization Table" produced.
10	1995		Saburo Suzuki (Shibaura)	The ceremony commemorating the 10th anniversary of establishment organized. The report on commissioned investigation project "Next Generation Material Investigation in Vacuum" published. At the 17th International Vacuum Exhibition, the 1st International Exchange Program sponsored by JETRO held.
11	1996	7 8	Asao Ueno (Ulvac) Kyuzo Nakamura (Ulvac)	A "PLP Guideline" (product liability prevention) published. The CS Committee established. Long-term Vision WG established. The report on commissioned investigation project "Investigation of Environmental Measurement Technology in Vacuum Field" published.
12	1997		Kyuzo Nakamura (Ulvac)	A "Long-term Vision WG Report" published. The report on commissioned investigation project "Technological Investigation of Solid Difference Evaluation and Calibration of Vacuum Meter" published.
13	1998	9	Shunji Nishihira (Anelva)	"Action 21 Project" formed. "Dictionary of Vacuum Pump Terminology" published. "Report on Traceability of Vacuum Pressure" published.
14	1999		Shunji Nishihira (Anelva)	The Planning Section abolished. JVIA home page opened. "Preparatory Committee for Incorporation" formed. "Report of the Action 21 Project" published. The office is moved to Shinbashi Onari-mon. "Vacuum Technology from the Basics" (Kogyo Chosakai Publishing Co., Ltd.) published.
15	2000	10	Tadao Sumi (Shibaura)	Overseas Inspection and study tour group agrees on international statistics structure with European companies. The first Vacuum Forum and the first Vacuum Symposium starts. The Forum, Specific Technology Promotion and Environment committees formed.
16	2001		Tadao Sumi (Shibaura)	Interaction Agreement with Korea Vacuum Research Association signed. Japan, U.S.A. and Europe agrees on international statistics collection and presentation. Overseas inspection and study tour group visits China and has interaction with Chinese General Machinery Vacuum Industry Association. Registration in the "Japan Standard Industry Categorization" completed. "Activity Report of Environment" published. "Dictionary of Vacuum Technology" (Kogyo Chosakai Publishing Co., Ltd.) published.
17	2002	11	Masayoshi Hirose (Ebara)	The committees reformed into Planning, Education, Standards, Technology, Statistics, Environment CS and Exhibition.